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Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
(Universiti Malaysia Perlis, 2008-03)
Electron beam induced deposition (EBID) is a well established technique for highresolution
direct material deposition from the gas phase onto a substrate. A finely focused electron beam of a scanning electron microscope ...
Study of aspect ratio performance on Silicon Oxide wet etching by using Profilometer, AFM and SEM
(Universiti Malaysia Perlis, 2008-03)
A study of aspect ratio performance on silicon oxide is developing to predict the
oxide profile on surface of wafer. The main focus of this project is to perform and
produce a high profile of silicon oxide under profiler ...
Analysis of the deposited carbon during Electron Beam Induced Deposition (EBID) in Scanning Electron Microscope using Secondary Ion Mass Spectrometry (SIMS)
(Universiti Malaysia Perlis, 2008-03)
Many experiments on the mechanics of nanostructures require the creation of rigid
clamps at specific locations. In this work, electron beam induced deposition (EBID) has been used to deposit carbon films that are similar ...