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Vertical-Lateral Thermal Actuator for MEMS design
(Universiti Malaysia Perlis, 2008-04)
Compact vertical and lateral thermal actuator has been design and simulation. The process of the simulation is to apply the current so it can make the arms hot enough to bend the design towards the cold arms. This current ...
MEMS Cantilever beam monitor
(Universiti Malaysia Perlis, 2008-04)
Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left ...