Browsing School of Microelectronic Engineering (FYP) by Subject "Silicon dioxide"
Now showing items 1-2 of 2
-
Optimization on oxidation process using 2K factorial design method
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Silicon technologies progress in the last twenty years has traced the path to the unprecedented revolution of information technologies, which has changed everybody’s lifestyles. With the help of software, the world of ... -
Study the effect of bird’s beak on Fully Recessed LOCOS and Poly Buffered LOCOS using 2 different pad Oxide
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)Device isolation is one of the most important technology features towards the realization of very large scale CMOS device integration. Since the early days of semiconductor industry, LOCOS isolation has been the major ...