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    • Analysis of square shaped Microstructure based Electron Beam induced deposition 

      Siti Fatimah Abd. Rahman (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly ...