Browsing School of Microelectronic Engineering (FYP) by Subject "Microstructure"
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Analysis of square shaped Microstructure based Electron Beam induced deposition
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)The fabrication of square shaped microstructures is studied by electron beam induced deposition (EBID) method using Scanning Electron Microscopy (SEM). EBID is a technique that allows the resistless deposition directly ...