Browsing School of Microelectronic Engineering (FYP) by Subject "Microelectronics -- Materials"

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    • Design and simulation of PZT Piezoelectric Microphone 

      Muhammad Aiman Ab. Mahat (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      Microphone is one of the most challenging and developing areas and markets in the field of micro sensor technology. Piezoelectric is one of sensing and actuation methods in Micro Electro Mechanical System or MEMS. This ...

    • Optimization of Nitride deposition process using Taguchi method 

      Low Zen Shiang (Universiti Malaysia PerlisSchool Of Microelectronic Engineering, 2008-04)
      The process of plasma enhanced chemical vapor deposition silicon nitride film which is used as barrier layer for the doped oxide in premetal dielectric (PMD) application and optimized using Design of Experiment (DOE) ...