Browsing School of Microelectronic Engineering (FYP) by Subject "Microelectronic fabrication"
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Study of acceleratin voltage influence the Conical structure during Electron Beam Induced Deposition (EBID)
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Electron beam induced deposition (EBID) is a well established technique for highresolution direct material deposition from the gas phase onto a substrate. A finely focused electron beam of a scanning electron microscope ...