Browsing School of Microelectronic Engineering (FYP) by Subject "Microelectromechanical systems -- Design and construction"

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    • Vertical electrostatic comb drive actuator for MEMS design 

      Wan Mokhdzani Wan Nor Haimi (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were ...

    • Vertical-Lateral Thermal Actuator for MEMS design 

      Muhammad Arefendy Ab. Rahim (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      Compact vertical and lateral thermal actuator has been design and simulation. The process of the simulation is to apply the current so it can make the arms hot enough to bend the design towards the cold arms. This current ...