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    • Vertical electrostatic comb drive actuator for MEMS design 

      Wan Mokhdzani Wan Nor Haimi (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were ...