Browsing School of Microelectronic Engineering (FYP) by Subject "CMOS device isolation"

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    • Study of Semi-Recessed LOCOS for Quasi-nanoscale CMOS Device Isolation 

      Mohamad Idzham Abd Sani (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)
      This project is entitled as semi-recessed LOCOS for CMOS device isolation. Local oxidation (LOCOS) technique is a widely used method for device isolation in semiconductor process integration. It is a simple, cheap yet and ...