Browsing School of Microelectronic Engineering (FYP) by Subject "Actuators"
Now showing items 1-5 of 5
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MEMS Cantilever beam monitor
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left ... -
Mems Microrelay: Design, Modeling, and Simulation
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-05)A newly design of single pole single throw piezoelectric vertical actuation MEMS microrelay was successfully designed and modeled at the end of this project. This was implemented by using MEMS Pro LEdit CAD Modeler. Then, ... -
Self testable pressure sensor based on phase change
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)Self-Testable Pressure Sensor Based on Phase Change is used to analyze the change of voltages. Basically, the device is using a pressure sensor. The use to sense the change of pressure is manipulated to sense the change ... -
Vertical electrostatic comb drive actuator for MEMS design
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were ... -
Vertical-Lateral Thermal Actuator for MEMS design
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Compact vertical and lateral thermal actuator has been design and simulation. The process of the simulation is to apply the current so it can make the arms hot enough to bend the design towards the cold arms. This current ...