Browsing School of Microelectronic Engineering (FYP) by Author "Nur Syuhada Md.Desa"
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Study of aspect ratio performance on Silicon Oxide wet etching by using Profilometer, AFM and SEM
Nur Syuhada Md.Desa (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-03)A study of aspect ratio performance on silicon oxide is developing to predict the oxide profile on surface of wafer. The main focus of this project is to perform and produce a high profile of silicon oxide under profiler ...