Browsing School of Microelectronic Engineering (FYP) by Author "Noraishah Azman"
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The Effect of Process Parameters on Metal Step Coverage for Aluminum by Evaporation Technique
Noraishah Azman (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)The degree to which deposited metals cover steps over topography is important to the yield and reliability of devices in very large scale integrations (VLSI). In evaporated and sputtered thin films, the most difficult steps ...