Browsing School of Microelectronic Engineering (FYP) by Author "Mujahidun Mashuri"
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Polysilicon Process Development – The Effect Of PECVD Process Parameters On The Film Characteristics
Mujahidun Mashuri (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2007-03)Thin polycrystalline silicon film has been used in the wide range of applications in the production of integrated circuits and other electronic products. Traditionally, polycrystalline silicon is deposited using Low ...