Browsing School of Microelectronic Engineering (FYP) by Author "Low Zen Shiang"
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Optimization of Nitride deposition process using Taguchi method
Low Zen Shiang (Universiti Malaysia PerlisSchool Of Microelectronic Engineering, 2008-04)The process of plasma enhanced chemical vapor deposition silicon nitride film which is used as barrier layer for the doped oxide in premetal dielectric (PMD) application and optimized using Design of Experiment (DOE) ...