Browsing School of Manufacturing Engineering (FYP) by Subject "Nanotechnology"
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Optimization of 950K PMMA resists for Nano-application using Statistical Design Expert
(Universiti Malaysia PerlisSchool of Manufacturing Engineering, 2008-05)This paper discusses the application of a design of experiments (DOE) experimental method for analyzing the influence of four parameters (coating time, spinning speed, and softbake time and softbake temperature).involved ...