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Single Crystal SiC Capacitive pressure sensor design and analysis using MEMS Pro L-Edit and Samcef Field & Oofelie software
(Universiti Malaysia Perlis, 2008-03)
Single crystal 3C-SiC capacitive pressure sensors are proposed for high-temperature sensing applications. SiC is an attractive material for harsh environment micromachined transducers due to its outstanding electrical, ...
Resonant Micromachined magnetic field sensor
(Universiti Malaysia Perlis, 2008-04)
This project is about the development of a micromachined magnetic field sensor. The operation of this sensor is based on a shift of the resonant frequency of a resonating
microstructure in presence of a magnetic field. ...
Design and analysis of Three-Axis Piezoresistive accelerometer
(Universiti Malaysia Perlis, 2008-04)
Recently, micro-electromechanical system (MEMS) technologies have been used to
manufacturer accelerometers. MEMS sensors include tranducers elements and the necessary signal conditioning electronics integrated together ...
MEMS Cantilever beam monitor
(Universiti Malaysia Perlis, 2008-04)
Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left ...