Browsing by Subject "Sub nano devices"
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Fabrication and characterization of ultra thin Si0₂ for nano devices: surface morphology and electrical study
(Universiti Malaysia Perlis (UniMAP)School of Microelectronic Engineering, 2007)The aim of this research is to fabricate and characterize (optical and electrical) an ultra thin silicon dioxide for sub nano devices. In this research, dry oxidation method using high temperature furnace is chosen to ...