Browsing by Subject "PECVD"

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    • Polysilicon process development for floating gate memory devices 

      Zarimawaty, Zailan; Ramzan, Mat Ayub; Mohd Rosydi, Zakaria (Universiti Malaysia Pahang, 2009-06-20)
      The commonly use device concept in memory industry is of floating gate type. In this type of memory, electrons were transferred from the substrate to the floating gate, and vice versa, by tunneling through ultra ...