Browsing by Subject "Microgap electrodes"
Now showing items 1-2 of 2
-
Fabrication of Amorphous silicon Microgap Structure for Energy Saving Devices
(Universiti Kebangsaan Malaysia, 2011-11-18)We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable ... -
Fabrication of amorphous silicon microgap structure for energy saving devices
(Sains Malaysiana., 2012-06)We report here the fabrication of microgaps electrodes on amorphous silicon using low cost techniques such as vacuum deposition and conventional lithography. Amorphous silicon is a low cost material and has desirable ...