Browsing by Subject "MEMS Micro Switch"

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    • Design and Fabrication of MEMS Micro Switch for Rf Applications 

      Zaliman, Sauli, Prof. Madya; Hasnizah, Aris; Razaidi, Hussin; Mohd Hafiz, Ismail; Rizalafande, Che Ismail (Malaysian Invention & Design Society (MINDS), 2006)
      MEMS Micro Switch is fabricated on a high-resistivity silicon substrate. A thin layer of polysilicon is deposited and patterned to define the top electrode.