Browsing by Subject "Electrons -- Beams"
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The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method
(Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)Electron beam induced deposition (EBID) is a method for high-resolution direct material deposition from the gas phase in the Scanning Electron Microscopy (SEM) onto a substrate. In this project, EBID method has been used ...