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    • MOS Transistor Mask Design Using SEM Based E-Beam Lithography 

      Uda, Hashim, Prof. Dr.; Nur Hamidah, Abdul Halim; Mohammad Nuzaihan, Md Nor; Zul Azhar, Zahid Jamal, Prof. Dr. (Malaysian Invention & Design Society (MINDS), 2006-05-19)
      Electron beam lithography (EBL) is one of the alternative tools in transferring micro and nano circuit patterns from design editor to the substrate. EBL is state-of-the-art technology for micro and even to nano feature ...