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    • Vertical-Lateral Thermal Actuator for MEMS design 

      Muhammad Arefendy Ab. Rahim (Universiti Malaysia PerlisSchool of Microelectronic Engineering, 2008-04)
      Compact vertical and lateral thermal actuator has been design and simulation. The process of the simulation is to apply the current so it can make the arms hot enough to bend the design towards the cold arms. This current ...