Browsing by Author "G. M., Sundaram"
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Material selection for CMOS compatible high Q and high frequency MEMS disk resonator using Ashby approach
G. M., Sundaram; Angira, Mahesh; Gupta, Navneet; Rangra, Kamaljit (Universiti Malaysia Perlis, 2016)In this paper, the most appropriate material for MEMS Disk resonator compatible with CMOS technology is selected using the Ashby approach. Materials indices are formulated based on three primary performance parameters, ...