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Title: | Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
Authors: | Uda, Hashim, Prof. Dr. Muhamad Emi Azri, Shohini |
Keywords: | DNA hybridization Lab-on-a-chip Nanogap Reverse spacer lithographic Spacer patterning technology International Conference on Advancement of Materials and Nanotechnology 2007 ICAMN 2007 |
Issue Date: | 11-Mar-2010 |
Publisher: | American Institute of Physics |
Citation: | AIP Conference Proceedings, vol.1217 (1), 2010, pages 505-509 |
Series/Report no.: | Proceedings of International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007 |
Abstract: | A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. The minimum-sized features are defined not by the photolithography but by the CVD film thickness. Therefore, this technology yields critical dimension (CD) variations of minimum-sized features much smaller than that achieved by conventional optical or e-beam lithography and has a great potential to fabricate a nanosystems for the electrical detection of biomolecular interactions. |
Description: | International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia. Link to publisher's homepage at http://proceedings.aip.org/ |
URI: | http://link.aip.org/link/?APCPCS/1217/505/1 http://dspace.unimap.edu.my/123456789/8205 |
ISBN: | 978-073540760-2 |
ISSN: | 0094-243X |
Appears in Collections: | Conference Papers Uda Hashim, Prof. Ts. Dr. |
Files in This Item:
File | Description | Size | Format | |
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Theoretical And Experimental.pdf | 41.87 kB | Adobe PDF | View/Open |
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