Silicon Nanowires Based DNA Biosensor

Abstract

This research describes the fabrication of silicon nanowire for DNA hybridization detection in biosensor application. The SiNWs are fabricated by electron beam lithography and followed by deposition of contact metals. Aurum is a suitable metal to make Ohmic contact with SiNWs and its exhibit electrical transport measurements of the devices. The presence of the hybridization DNA will induce electronic charge and changed the electronic properties of the devices from which detectable electronic signals are generated.