Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype

Please use this identifier to cite or link to this item: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/8085

Title:	Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype
Authors:	Zaliman, Sauli, Assoc. Prof. Hasnizah, Aris Johari, Adnan, Assoc. Prof. Dr. Poopalan, Prabakaran, Assoc. Prof. Dr. Ramzan, Mat Ayub Rizalafande, Che Ismail Sohiful Anuar, Zainol Murad Azuwir, Md. Nor Abu Hassan, Abdullah Mohd. Hatta, Musa Razaidi, Hussin zaliman@unimap.edu.my
Keywords:	MEMS tehnology Manifold Absolute Pressure Sensor (MAPs) Automotive UniMAP -- Research ITEX 2007 International Invention, Innovation and Technology Exhibition 2007 (ITEX 2007)
Issue Date:	18-May-2007
Publisher:	Malaysian Invention and Design Society (MINDS)
Series/Report no.:	18th International Invention, Innovation and Technology Exhibition 2007 (ITEX 2007)
Abstract:	The pressure sensor is a monolithic absolute pressure transducer. The transducer utilizes as sensing element, which varies its output voltage when pressure is applied to surface micro-machined silicon diaphragm.
Description:	Assoc. Prof. Zaliman Sauli and his team from School of Microelectronics Engineering won silver for Development of MEMS Manifold Absolute Pressure Sensor (MAPs) Prototype. ITEX 2007, 18th - 20th May 2007 was held at Kuala Lumpur Convention Centre (KLCC), Kuala Lumpur.
URI:	http://dspace.unimap.edu.my/123456789/8085
Appears in Collections:	Universiti Malaysia Perlis

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