Thermal investigation of a holweck turbomolecular pump

Abstract

In this research, a holweck turbomolecular pump subjected to operation condition is studied thermally. Geometrical dimensions and mechanical properties as well as operation condition, including pressure and temperature of fluid and the transition pressure, affect the temperature variations of the components of the pump. Also the relations are introduced for both viscous and molecular regimes. This study will be useful in fabrication and cooling system design of such pumps and it can serve as a basis for investigating turbomolecular pumps. Assuming two viscous and molecular regimes, the temperature raise in transition section of the pump are investigated.