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dc.contributor.authorZaiazmin, Y. N.-
dc.contributor.authorIshak, Abdul Azid-
dc.date.accessioned2009-08-17T07:11:02Z-
dc.date.available2009-08-17T07:11:02Z-
dc.date.issued2007-11-
dc.identifier.citationp.191-195en_US
dc.identifier.isbn978-1-4244-0730-9-
dc.identifier.issn1089-8190-
dc.identifier.urihttp://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=4456454-
dc.identifier.urihttp://dspace.unimap.edu.my/123456789/6917-
dc.descriptionLink to publisher's homepage at http://ieeexplore.ieee.orgen_US
dc.description.abstractThis paper presents a comparative study of MEMS Piezoresistive Pressure Sensor simulation using two different software of ANSYS and CATIA respectively. It is aimed to investigate the feasibility of utilizing CATIA software in simulating microstructure such as MEMS device as an alternative to ANSYS simulation software. CATIA software is chosen because it is usually used in the automotive industries worldwide. Two types of diaphragm design were used in this simulation which is supported rim and without supported rim. Tetrahedral meshing with size of 0.05 mm was used in both ANSYS and CATIA simulation. Analysis of results is then made on the magnitude of x-component and Von Misses stresses on the surface of the diaphragm and also the diaphragm deflection. Based on the findings, it is concluded that CATIA software can also be used as an alternative in modeling and simulating a microstructure such as MEMS device.en_US
dc.language.isoenen_US
dc.publisherInstitute of Electrical and Electronics Engineering (IEEE)en_US
dc.relation.ispartofseriesProceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT)en_US
dc.subjectDigital simulationen_US
dc.subjectMicromechanical devicesen_US
dc.subjectPressure sensorsen_US
dc.subjectComputerised instrumentationen_US
dc.subjectCATIA (Computer file)en_US
dc.subjectComputer-aided engineeringen_US
dc.subjectANSYS (Computer system)en_US
dc.subjectSensoren_US
dc.titleComparison between ANSYS and CATIA simulation capability in simulating round shape diaphragm of MEMS piezoresistive pressure sensoren_US
dc.typeArticleen_US
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