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Issue Date
Title
Author(s)
Jan-2014
Surface roughness and wettability correlation on etched platinum using reactive ion ecthing
Zaliman, Sauli, Dr.
;
Retnasamy, Vithyacharan
;
Aaron, Koay Terr Yeow
;
Goh, Siew Chui
;
Khairul Anwar, Mohamad Khazali
;
Nooraihan, Abdullah
;
zaliman@unimap.edu.my
2014
Surface roughness scrutinizaton with RIE CF₄+Argon gaseous on platinum deposited wafer
Zaliman, Sauli, Dr.
;
Retnasamy, Vithyacharan
;
Aaron, Koay Terr Yeow
;
Siew Chui, Goh
;
Khairul Anwar, Mohamad Khazali
;
Nooraihan, Abdullah
;
zaliman@unimap.edu.my
2014
Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous
Zaliman, Sauli, Dr.
;
Retnasamy, Vithyacharan
;
Aaron, Koay Terr Yeow
;
Siew Chui, Goh
;
Khairul Anwar, Mohamad Khazali
;
Nooraihan, Abdullah
;
zaliman@unimap.edu.my
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Author
3
Khairul Anwar, Mohamad Khazali
3
Nooraihan, Abdullah
3
Retnasamy, Vithyacharan
3
Zaliman, Sauli, Dr.
2
Siew Chui, Goh
.
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Subject
3
Platinum
3
Reactive Ion Etching (RIE)
3
Surface roughness
2
DOE
1
CF₄+Argon
.
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Date issued
3
2014