Spectroscopic study of Titanium Dioxide thin films prepared by pulsed laser deposition

Abstract

This paper aims to investigate the effect of different type of target on spectroscopic features of titanium dioxide thin films prepared by laser ablation method. The results of this structural study show that the sample deposited using metallic titanium (Ti) target contains a large proportion of developed rutile phase. However, the sample deposited using pressured annealed disc of titanium oxide (TiO2) target mainly consists of anatase phase. This study also found that the use of metal targets leads to higher optical transparency and a higher energy band gap.