Gold nanoparticles embedded silicon channel biosensors for improved sensitivity

Abstract

This project presents the fabrication steps of biosensors device on silicon On-Insulator (SOI), embedded with gold nanoparticles (GNPs) to enhance the sensitivity of the detection. Conventional photolithography technique is use to fabricate the divice. Surface morphology of the fabricated device is characterized using scanning Electron Microscope (SEM) and Atomic Force Microscopr (AFM) and followed by current-voltage characteristic using saurce meter. The electrical behavior of the fabricated device is compared for the device with or without gold nanoparticles. By incorporating the gold nanoparticles, it boosts up the signal and enhance the sensitivity of the device.