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Mohammad Nuzaihan Md Nor, Associate Professor Dr.
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Issue Date
Title
Author(s)
2014
Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method
Mohammad Nuzaihan, Md Nor
;
Uda, Hashim, Prof. Dr.
;
Nazwa, Taib
;
Tijjani Adam, Shuwa
;
m.nuzaihan@unimap.edu.my
;
uda@unimap.edu.my
;
nazawa_nice@yahoo.com
;
tijjaniadam@yahoo.com
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Author
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Mohammad Nuzaihan, Md Nor
1
Tijjani Adam, Shuwa
1
Uda, Hashim, Prof. Dr.
Subject
1
Advance nanolithography
1
Atomic force microscopy (AFM)
1
BOE
1
EBL
1
Inductively coupled plasma-reacti...
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Date issued
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2014