1. UniMAP Library Digital Repository
  2. Journal Articles
  3. School of Microelectronic Engineering (Articles)
Please use this identifier to cite or link to this item: http://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546
Full metadata record
DC FieldValueLanguage
dc.contributor.authorHuzein Fahmi, Hawari-
dc.contributor.authorYufridin, Wahab, Dr.-
dc.contributor.authorM. T., Azmi-
dc.contributor.authorAli Yeon, Md Shakaff, Prof. Dr.-
dc.contributor.authorUda, Hashim, Prof. Dr.-
dc.contributor.authorShazlina, Johari, Dr.-
dc.date.accessioned2015-04-22T04:08:35Z-
dc.date.available2015-04-22T04:08:35Z-
dc.date.issued2014-
dc.identifier.citationJournal of Physics: Conference Series, vol. 495(1), 2014, pages 1-9en_US
dc.identifier.issn1742-6588-
dc.identifier.uriiopscience.iop.1/012045/org/1742-6596/495/-
dc.identifier.urihttp://dspace.unimap.edu.my:80/xmlui/handle/123456789/39546-
dc.descriptionLink to publisher's homepage at http://iopscience.iop.org/en_US
dc.description.abstractOne the major requirements for sensing devices is its sensitivity. This paper presents the design, analysis and simulation of various types of MEMS based microcantilevers shapes and their influence on sensing sensitivity. A commercial finite element analysis software ANSYS is used to analyze the designs. Six different analytical model of the microcantilever were investigated for its Equivalent (von-Mises) stress, maximum deflection and fundamental resonant frequency. Finally, the best sensitive structure is then identified. It is found that the trapezoidal design microcantilever would have significant sensing advantages compared to other remaining microcantilever shape.en_US
dc.language.isoenen_US
dc.publisherInstitute of Physics Publishingen_US
dc.subjectComposite micromechanicsen_US
dc.subjectMicro-cantileversen_US
dc.subjectChemical sensorsen_US
dc.subjectMaximum deflectionen_US
dc.titleDesign and analysis of various microcantilever shapes for MEMS based sensingen_US
dc.typeArticleen_US
dc.contributor.urlhuzeinfahmi@gmail.comen_US
dc.contributor.urlyufridin@unimap.edu.myen_US
dc.contributor.urlaliyeon@unimap.edu.myen_US
dc.contributor.urluda@unimap.edu.myen_US
dc.contributor.urlshazlinajohari@unimap.edu.myen_US
Appears in Collections:School of Microelectronic Engineering (Articles)
Ali Yeon Md Shakaff, Dato' Prof. Dr.
Uda Hashim, Prof. Ts. Dr.
Yufridin Wahab, Assoc. Prof. Dr.

Files in This Item:
File Description SizeFormat 
Design and analysis of various microcantilever shapes for MEMS based sensing.pdf1.01 MBAdobe PDFView/Open
Show simple item record


Items in UniMAP Library Digital Repository are protected by copyright, with all rights reserved, unless otherwise indicated.