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Issue Date
Title
Author(s)
Sep-2012
Silica microchannel fabrication using fluorine based rie with alas a mask
Wan Mokhzani, Wan Norhaimi
;
Retnasamy, Vithyacharan
;
Zaliman, Sauli, Assoc. Prof. Dr.
;
Taniselass, Steven
;
Ahmad Husni, Mohd Shapri
;
Norazeani, Abdul Rahman
;
Abdul Halis, Abdul Aziz
;
wanmokhdzani@unimap.edu.my
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Abdul Halis, Abdul Aziz
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Ahmad Husni, Mohd Shapri
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Norazeani, Abdul Rahman
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Subject
1
Microfluidics
1
Reactive Ion Etching Process (RIE)
1
Silica microchannel
Date issued
1
2012