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Ammar Zakaria, Associate Professor Dr.
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Issue Date
Title
Author(s)
Apr-2014
Effect of substrate bias in copper sputtering plasma measured by Langmuir Probe
Jia Wei, Low
;
Nafarizal, Nayan
;
Mohd Zainizan, Sahdan
;
Mahamad, Abd Kadir
;
Mohd Khairul, Ahmad
;
Ali Yeon, Md Shakaff
;
Ammar, Zakaria
;
Fathinul Syahir, Ahmad Saad
;
Ahmad Faizal, Mohd Zain
;
jwlow88@hotmail.com
;
nafa@uthm.edu.my
;
zainizan@uthm.edu.my
;
kadir@@uthm.edu.my
;
akhairul@uthm.edu.my
;
aliyeon@unimap.edu.my
;
ammarzakaria@unimap.edu.my
;
fathinul@unimap.edu.my
;
afaizal@ump.edu.my
2014
Influence of dissipation power in copper sputtering plasma measured by optical emission spectroscopy
Kevin, Low
;
Nafarizal, Nayan, Prof. Madya Dr.
;
Mohd Zainizan, Sahdan, Dr.
;
Abd Kadir, Mahamad, Dr.
;
Mohd Khairul, Ahmad, Dr.
;
Ali Yeon, Md Shakaff, Prof. Dr.
;
Ammar, Zakaria
;
Fathinul Syahir, Ahmad Sa'ad
;
Ahmad Faizal, Mohd Zain
;
jwlow88@hotmail.com
;
nafa@uthm.edu.my
;
zainizan@uthm.edu.my
;
kadir@uthm.edu.my
;
akhairul@uthm.edu.my
;
aliyeon@unimap.edu.my
;
ammarzakaria@unimap.edu.my
;
fathinul@unimap.edu.my
;
afaizal@ump.edu.my
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Author
2
Ahmad Faizal, Mohd Zain
2
Ammar, Zakaria
1
Abd Kadir, Mahamad, Dr.
1
Ali Yeon, Md Shakaff
1
Ali Yeon, Md Shakaff, Prof. Dr.
.
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Subject
2
Copper oxide
1
Langmuir probe
1
Optical emission spectroscopy
Date issued
2
2014