Low loss optimization of strip channel polysilicon waveguide fabrication

Abstract

Research on waveguide structures, its behaviour and material properties are very extensive for a wide range of applications. Generally, waveguides are used for optical devices such as biosensors. This paper investigates and presents an overview of the formation of waveguides using polysilicon as a waveguide material. Besides that, this paper elaborates and summarizes the important control parameters which influence the waveguide performance such as thickness, flatness, surface roughness, grain side, defects among others. The aimed that this review paper to come up with optimized parameters for the design of linear waveguides with maximum sensitivity in an evanescent field and low optical loss.