Silicon nanowires array pH sensor with integrated microfluidic channel

Abstract

Silicon nanowires based biosensors have garnered great potential in serving as a highly sensitive, label-free and real-time response biosensing application. These biosensors are useful in detecting pH, DNA molecules, proteins and even single viruses. The geometrical characteristics and performance of silicon nanowires array for pH level detection are p.ivotal in this invention. The smallest sizes of the fabricated silicon nanowires structure is 20 nm width and 400 11m length. A 100 11m microfluidic channel is bonded on top of the silicon nanowires to transport the pH solution. pH level detection is performed by utilizing the standard aqueous pH buffer solutions (pH 1 to pH 12) to test the electrical response of the sensor. The silicon nanowires sensor shows the highest resistance value for pH<7 and the lowest resistance value for pH>?