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Title: | Design and simulation of film bulk acoustic wave resonator in kuband |
Authors: | Nurul Izza, Mohd Nor, Dr. Kriyang, Shah Singh, Jugdutt Zaliman, Sauli, Dr. izza@unimap.edu.my nimohdnor@students.latrobe.edu.au k.shah@latrobe.edu.au Jack.Singh@latrobe.edu.au zaliman@unimap.edu.my |
Keywords: | Fbar Fbar filter Ku-band Rf mems |
Issue Date: | 2013 |
Publisher: | Trans Tech Publications |
Citation: | Advanced Materials Research, vol. 662, 2013, pages 556-561 |
Abstract: | This paper presents the design of a Film Bulk Acoustic Wave Resonators (FBARs) operating in Ku-band. The one-dimensional (1-D) numerical and the three-dimension (3-D) Finite Element Method (FEM) simulation results are analysed and compared. The results show that coupling coefficient (k2 eff) up to 6.5% can be obtained with optimised thickness ratio of electrode/piezoelectric layers of operating frequencies greater than 15GHz. The FBARs have areas of 1.69x10-4μm2 and 7.84x10-4μm2 for series resonance frequency of 14.7GHz and 15.9GHz respectively and achieves quality (Q) factor of 300. The designed FBAR filter operating in Ku-band has the centre frequency of 15.5 GHz, the insertion loss of 3.5dB, out-of-band rejection of 13dB and fractional bandwidth of 6.6% |
Description: | Link to publisher's homepage at http://www.ttp.net/ |
URI: | http://www.scientific.net/AMR.662.556 http://dspace.unimap.edu.my:80/dspace/handle/123456789/34837 |
ISBN: | 978-303785640-6 |
ISSN: | 1022-6680 |
Appears in Collections: | Zaliman Sauli, Lt. Kol. Professor Dr. School of Microelectronic Engineering (Articles) |
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Design and simulation of film bulk acoustic wave resonator in kuband.pdf | 38.01 kB | Adobe PDF | View/Open |
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