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| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 203 |
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| November 2024 | December 2024 | January 2025 | February 2025 | March 2025 | April 2025 | May 2025 | |
|---|---|---|---|---|---|---|---|
| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 3 | 8 | 4 | 8 | 3 | 2 | 0 |
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| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous.pdf | 39 |
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