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| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 139 |
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| January 2024 | February 2024 | March 2024 | April 2024 | May 2024 | June 2024 | July 2024 | |
|---|---|---|---|---|---|---|---|
| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous | 19 | 7 | 1 | 0 | 3 | 13 | 6 |
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| Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous.pdf | 28 |
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