ZnO thin film deposition on butterfly shaped electrodes for ultravioletsensing applications

Abstract

ZnO thin film was deposited on patterned gold electrodes using sol-gel spin coating technique. Conven-tional photo-lithography with wet etching process was used to create butterfly shaped 13-m gap fromzero gap chrome mask. The deposited thin film was characterized structurally, morphologically and elec-trically using X-ray diffraction, scanning electron microscope and Kiethly sourcemeter. Current-voltage(I-V) characterization was captured in dark and UV conditions. The current gain of the fabricated devicewas 1.36 and the response and recovery time of the sensor was 76 s and 104 s, respectively, showed thefabricated device can be used for UV applications.