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dc.contributor.authorMohd Khairuddin, Md Arshad-
dc.contributor.authorIbrahim, Ahmad-
dc.contributor.authorAzman, Jalar-
dc.contributor.authorGhazali, Omar-
dc.date.accessioned2008-11-06T05:05:12Z-
dc.date.available2008-11-06T05:05:12Z-
dc.date.issued2006-
dc.identifier.citationMicroelectronics Reliability, vol.46, 2006, pages 367-379.en_US
dc.identifier.other10.1016/j.microrel.2005.01.018-
dc.identifier.urihttp://dspace.unimap.edu.my/123456789/3018-
dc.identifier.urihttp://www.elsevier.com/locate/microrel-
dc.descriptionLink to publisher's homepage at www.elsevier.com/locate/microrelen_US
dc.description.abstractThis paper discusses on the surface characteristics of each of the seven set-up process steps prior completion of under bump metallurgy (UBM) deposition. The Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM) techniques were used to obtain the surface roughness and morphology of each deposition process. The elemental analysis using Energy Disperse X-Ray (EDX) and precision micro-cross-section using Focus Ion Beam (FIB) was also used in this study. The first zincation process has high surface roughness but preserved surface morphology of initial thin-film surface. The second zincation provides the improved surface roughness due to the replacement aluminum layer with ion zinc in the solution. Smooth surfaces leads to better shear strength. However, second zincation will affect the Al thickness, hence excessive attacks on Al layer may cause reliability problem.en_US
dc.language.isoenen_US
dc.publisherElsevier Scienceen_US
dc.subjectElectroless nickel immersion gold (ENIG)en_US
dc.subjectUnder bump metallurgy (UBM)en_US
dc.subjectSurface roughnessen_US
dc.subjectZincationen_US
dc.subjectMechanical engineeringen_US
dc.subjectSurface morphologyen_US
dc.titleThe surface characteristics of under bump metallurgy (UBM) in electroless nickel immersion gold (ENIG) depositionen_US
dc.typeArticleen_US
dc.relation.doi10.1016/j.microrel.2005.01.018-
Appears in Collections:School of Microelectronic Engineering (Articles)

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