The alignment of single SWNTs between electrode using dielectrophoresis

Abstract

This paper presents the development and fabrication of electrical devices based on alignment of carbon nanotubes (CNTs) in single bundle of single-walled carbon nanotubes (sb-SWNTs) using dielectrophoresis (DEP). The Silicon Oxide is formed to insulate between the Aluminum (Al) and the silicon wafer. Al electrodes with 5 gaps made via micro-lithography process were used to align the CNT. The characteristics of the sb-SWNTs were evaluated from SEM, C-F, and Z-F curve. This manual aligned method has potential for application, such as biosensors, CNT device for Halal and non-Halal detection, or DNA sensors.