Electrostatic pull-in characteristic of silicon diaphragm for MEMS micropump design

Abstract

Electrostatic actuation method is commonly employed for MEMS micropump mechanism which consists of diaphragm microstructure and parallel electrode. This work discussed on design and simulation of square silicon diaphragms and it characteristics for micropump application which supply voltage range of 0V-20 V. The characterizations of these diaphragms were based on the measurement on parameters such as diaphragm displacement as function of voltage applied and stress distribution. The simulations were carried out using CoventorWare2007. Results show that simulation deviate theoretical value in a range of below 15%. The displacement of the diaphragm was proportional to the physical geometry of the diaphragm. Pull-in voltage defines the limitation value for micropump operation.