Evaluation of effective factors on Diaphragm's Deflection and mechanical sensitivity of an intraocular capacitive pressure sensor

Abstract

To design mechanical pressure sensors, analysis of the deflection behavior of diaphragms is necessary. This paper describes effective factors on diaphragm's deflection and mechanical sensitivity of an Intraocular capacitive pressure sensor. Intraocular pressure sensors are important in detection and treatment of a fatal disease attributed to glaucoma. These pressure sensors have been designed to measure pressures in the range of 0 to 60 mmHg. This type of sensors operate by deformation of movable membrane for IOP diagnosis. So deflection of the diaphragm is a main factor for better performance of these pressure sensors. The principle of the paper is to Evaluate effective factors on sensor diaphragm and compare the results with the simulation using FEA method for a square diaphragm deflection. Generally, analysis of diaphragm behaviors are useful as they provide the designers better understanding and supplemental guidance.