Please use this identifier to cite or link to this item:
http://dspace.unimap.edu.my:80/xmlui/handle/123456789/2004
Title: | Vertical electrostatic comb drive actuator for MEMS design |
Authors: | Wan Mokhdzani Wan Nor Haimi Hafiz Ismail (Advisor) |
Keywords: | Microelectromechanical systems -- Design and construction Microelectronics Actuators Comb-drive actuator Microsensor Detectors |
Issue Date: | Apr-2008 |
Publisher: | Universiti Malaysia Perlis |
Abstract: | This report serves as a summary for project titled Vertical Electrostatic Comb-Drive Actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuation force for a certain amount of displacement for the use of deflection. The comb-finger structure moves in a perpendicular direction to the substrate as a function of applied voltages. Actuation force changes for different physical parameters of the comb finger structure. |
Description: | Access is limited to UniMAP community. |
URI: | http://dspace.unimap.edu.my/123456789/2004 |
Appears in Collections: | School of Microelectronic Engineering (FYP) |
Files in This Item:
File | Description | Size | Format | |
---|---|---|---|---|
Abstract, Acknowledgment.pdf | 67.39 kB | Adobe PDF | View/Open | |
Conclusion.pdf | 20.33 kB | Adobe PDF | View/Open | |
Introduction.pdf | 86.49 kB | Adobe PDF | View/Open | |
Literature review.pdf | 107.39 kB | Adobe PDF | View/Open | |
Methodology.pdf | 684.61 kB | Adobe PDF | View/Open | |
References and appendix.pdf | 784.78 kB | Adobe PDF | View/Open | |
Results and discussion.pdf | 295.21 kB | Adobe PDF | View/Open |
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