MEMS Cantilever beam monitor

Abstract

Three cantilever beam monitor has been designed using the same material and dimension. They are the center, left and right cantilever beam with their own contact pad. The center beam can be displaced to the right or left which mean the center beam will be connected to other contact pad. The overall aim of this project was to design and analyze the cantilever beam monitor using MEMs Pro and OOFILEE. The main function of this cantilever beam is to detect the contact force and the displacement when the load force is applied. This analysis and simulation was successfully done, however the beam fail in some condition. The problem occurs because the beam is too short and it cannot be connected to the right or left contact pad. When the large load force had been applied to contact pad, it will damage the pad.