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Study of the effect of different Gases parameter in Dry Etching process on Etch Rate profile 114

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Study of the effect of different Gases parameter in Dry Etching process on Etch Rate profile 2 4 14 5 1 1 0

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Abstract, Acknowledgment.pdf 13
Literature review.pdf 4
Conclusion.pdf 3
Introduction.pdf 3
Methodology.pdf 3
References and appendix.pdf 3
Results and discussion.pdf 2

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