Design and simulation of Piezoresistive pressure sensor

Abstract

The piezoresistive effect describes the changing electrical resistance of a material due to applied mechanical stress. Electrical resistor will change its resistance when it experiences a strain and deformation. Pressure sensor system consists of a diaphragm over a sealed cavity. The difference in pressure between opposing sides of the diaphragm causes a stress and possibly a displacement of the diaphragm. This thesis will discuss the stress occurs at the membrane due to applied surface force and the relationship between thickness, displacement and stress.