Self testable pressure sensor based on phase change

Abstract

Self-Testable Pressure Sensor Based on Phase Change is used to analyze the change of voltages. Basically, the device is using a pressure sensor. The use to sense the change of pressure is manipulated to sense the change of voltages. To build this voltage sensor, the device is built using the combination of sensor and actuator. The actuator part consist the heating resistor and water where the sensor part consist the piezoresistive sensor. By using sandwich structure, the heating resistor which placed on the bottom part of the device will boil the water. The boiled water will produce water vapor which produce small amount of pressure. The pressure will channel to the pressure sensor. The pressure sensor will sense the change of pressure and interpret it in the form of output voltage which can be analyzed using another system or computer analyzed. The expected result is the more input voltage applied to the heating resistor, the more pressure produced, the more output voltage can be observed. During this project, I only focus on the use of software to design the device using MEMS Pro Software and analyze the sensitive membrane of the pressure sensor using SAMCEF Field software. The analysis is done to observe the rate of nodal displacement and stress tensor on the sensitive membrane to study the sensitivity of the membrane to the change of pressure. It is important for a pressure sensor having a high sentivity of thin membrane.